There several applications where more than one layers are applied on a substrate. E.g. in the realization od semiconductor devices, in planar photonics, in opthalmiatric lenses, in antireflective coatings etc.

FR-tools and FR-monitor software allow for the simultaneous and accurate measurement of the individual thicknesses of multiple layers. In particular, ThetaMetrisis solutions have been proved capable in the accurate determination of the thicknesses of multilayers within a wide range of diverse applications and with individual thicknesses from few nanometers such as:

• Si₃N₄/SiO₂/Si for semiconductor devices
• Resist/Si₃N₄/SiO₂/Si for semiconductor devices and planar waveguides
• SiO₂/Si₃N₄/SiO₂/Si for planar waveguides
• AntiFogging and HardCoat for automotive headlights
• HardCoat and IntemediateLayer for protective sheets.

Furthermore, FR-Monitor provides the concept of linked layers that allow the characterization of antireflective layers in bilayer and trilayer stacks .