FR-uProbe, simply attaches to the C-mount adapter of most commercially available optical microscopes (reflectance and / or transmittance) and provides:
- Real-time spectroscopic measurements at the
wavelength range supported by the microscope - Film thickness, optical properties, non-uniformity
measurements - Imaging with an integrated, USB connected and
high-resolution & quality color camera - Unaffected performance of the microscope itself
The spot size, the area from which the reflectance or trasnmittance signal is collected is defined by the aperture size and objective lens magnification and can be as small as 2μm.
- Univ. & Research labs
- Semiconductors(Oxides, Nitrides, Si, Resists, etc.)
- MEMS devices(Photoresists, Si, membranes, etc.)
- LED
- Data Storage
- Anodization
- Hard/Soft coatings on curved substrates
- Polymer coatings(adhesives, etc.)
- Biomedical(parylene, ballon wall thickness, etc.)
- And more…
(Contact us with your requirements)
- Single-click analysis (no need for initial guess)
| FR-uProbe | FR-uProbe-LC | ||
|---|---|---|---|
| Microscope | Reflectance/Transmittance trinocular | ||
| Spectral Range (depends on light source) | 400nm – 1000nm | 400nm – 1000nm | |
| # Pixels | 3648 | 1024 | |
| Thickness range (5X objective lens) | 15nm – 90μm | 20nm – 50μm | |
| Thickness range (10X objective lens) | 15nm – 80μm | 20nm – 45μm | |
| Thickness range (20X objective lens) | 15nm – 50μm | 20nm – 30μm | |
| Thickness range (40X objective lens) | 15nm – 25μm | 20nm – 15μm | |
| Refractive Index calculation | ✓ /min. thickness: 100nm | ✓ /min. thickness: 100nm | |
| Thickness Accuracy** | 0.2% or 2nm | 0.3% or 3nm | |
| Thickness Precision** | 0.02nm | 0.05nm | |
| Thickness stability** | 0.05nm | 0.07nm | |
| Camera | 2M/5M pixels | 2M/5M pixels | |
| Working distance | |||
| Internal Light source | Defined by objective lens | ||
| Microscope’s Light source | Stabilized tungsten halogen, MTBF >3000h with filter holder (OPTIONAL) | ||
| Wavelength resolution | 0.8nm | Microscope’s light source (tungsten / LED) | 1.5nm |
| A/D converter | |||
| FR-API | YES | 16 bit | NO |
| Power | |||
| Dimensions | USB – (external light source), 110V/230V, 50-60Hz, 20W (internal light source) | ||
| Material Database | 220x160x95mm (Spectrometer) & 227x107x51mm (microscope attachment) | ||
| SW Characteristics | FR-Monitor v4.0 (free of charge updates) Full details at related catalog’s page | ||
The measurement area (the area from which the reflectance or transmittance signal is collected) is relative to the microscope’s objective lens and the FR-uProbe’s aperture size. Standard apertures sizes are: 500μm, 250μm, 100μm. Apertures with size 150μm and 50μm are also available upon request.
| Objective Lens | Spot Size (μm) | ||
|---|---|---|---|
| 500 μm Aperture | 250 μm Aperture | 100 μm Aperture | |
| 5x | 100μm | 50μm | 20μm |
| 10x | 50μm | 25μm | 10μm |
| 20x | 25μm | 14μm | 5μm |
| 50x | 10μm | 5μm | 2μm |
