FR-Ultra is a unit dedicated for the fast, accurate and non-destructive measurement of thick and ultra-thick semiconductor and transparent layers.
Thanks to its advanced optics, FR-Ultra can measure either smooth or rough films & substrates of very high thickness.
Typical applications include:
- Thickness measurement of thick glasses (up to 2mm in thickness either clear or haze)
- Thickness measurement of wafers (e.g. Single or Double
- Side Polished wafers up to 12in in diameter).
- FR-Ultra can be easily integrated with Cartesian and Polar stages for thickness mapping over large areas.
- Univ. & Research labs
- Semiconductors(Oxides, Nitrides, Si, Resists, etc.)
- Polymer & Resist characterization
- Dielectric characterization
- Hardcoat, Anodization
- And more…
(Contact us with your requirements)
- Single-click analysis (no need for initial guess)
- Dynamic measurements
- 800+ materials
- Multiple installations for off-line analysis
- Free of-charge Software update
| Model | NIR/N3 | VIS/NIR | ||||
|---|---|---|---|---|---|---|
| WL Range -nm | 1280-1350 | 380-1000 | ||||
| Pixels | 512 | 2048 | ||||
| Thick. Accuracy*,** | 0.4% | 0.2% | ||||
| API support | – | – | ||||
| Light Source | SLED (internal), > 150000h (MTBF) | Tungsten, 2000h (MTBF) | ||||
| Integration Time | 5msec (min) | 5msec (min) | ||||
| Objective Lens | 5X | 10X | 20X | 5X | 10X | 20X |
| Thickness range (n=1.5) | 10μm – 2mm | 10μm – 2mm | 10μm – 1.9mm | 10μm – 2mm | 10μm – 2mm | 10μm – 1.9mm |
| Si Thickness range (n=3.5) | 7μm – 1mm | 7μm – 1mm | 7μm – 0.9mm | 7μm – 1mm | 7μm – 1mm | 7μm – 0.9mm |
| Spot size | 40μm | 18μm | 12μm | 40μm | 18μm | 12μm |
| Nominal WD | 45mm | 34mm | 31mm | 45mm | 34mm | 31mm |
| WD tolerance @100 μm thickness | 16mm | 4mm | 1.2mm | 16mm | 4mm | 1.2mm |
| WD tolerance @500μm thickness | 4mm | 1.2mm | 0.8mm | 4mm | 1.2mm | 0.8mm |
| Material Database | > 800 different materials | |||||
| Dimensions/Weight | 39x32x22cm (LxWxH), 13Kg (stage excluded) | |||||
| Power | 110V/230V, 50-60Hz, 50W | 110V/230V, 50-60Hz, 30W | ||||
| SW Characteristics | SW Characteristics FR-Monitor v4.0 (free of charge Updates) | |||||
Camera: Optical module for visualization of the area under characterization and measurement spot
Stage: XY-A200 (200mm travel) or RΘ-150 (300mm diameter) stage for wafer mapping