Parameter |
FR-tools |
Ellipsometry |
Stylus Profilometer |
X-ray reflectivity (XRR) |
Minimum thickness |
1nm |
<1nm |
20nm |
<1nm |
Maximum thickness |
500um |
10um |
Few mm |
200-300 nm (depending on the contrast) |
RI measurement |
Yes |
Yes |
No |
No |
Thickness Mapping |
Yes |
Yes |
No |
Time consuming |
Step Profiling |
No |
No |
Yes |
No |
Capability for Process Monitoring |
High |
Moderate |
N/A |
N/A |
Probe goes over the sample |
Yes |
No |
No |
No |
Overall Measurement Speed |
High |
Moderate |
Slow |
Very Slow |
Data Acquisition Rate |
10msec per measurement |
>2sec-fast mode, >10 sec. – Standard mode |
5-30sec per measurement |
Average: 30 min per measurement- |
Portability |
Yes |
No |
No |
No |
Easy of Use |
Yes |
Moderate |
Yes |
No |
Destructive |
No |
No |
Yes |
No |
Special Training |
No |
Yes |
No |
Yes |
Moving Parts |
No |
Yes |
Yes |
Yes |
Repeatability/Stability |
0.1nm |
0.1nm |
0.4nm |
Yes |
Thermal Measurements |
Yes |
Yes |
No |
Ν/Α |
Sample Preparation |
No |
No |
Yes |
No |
Multiple Layers Measurement |
Yes |
Yes |
No |
Yes |
Customization |
Yes |
No |
No |
Yes |
Reflectance, Transmittance, Absorbance, Specular/Diffuse Reflectance, Haze, Color measurements |
Yes |
Yes (under certain conditions) |
No |
No |
Dimensions |
Handheld/Table-top Small (>300mm W x 110mm D x 40mm H)* |
Table-top Medium (500 mm W x 300 mm D x 300 mm H) |
Table-top Medium (450 mm W x 550 mm D x 350 mm H) |
Large (1400mm W x 850mm D x 1800 H) |
Weight |
0.65Kg * |
>17 kg |
>30 kg |
>350Kg |
Price of Replacement parts |
Low |
High |
High |
Extremely High |
Price (Basic system) |
Low (<$10K) |
High(>$30K) |
High(>$30K) |
Very High |
Particular Characteristics |
Film thickness Refractive Index Surface roughness Uniformity
|
SWE: Film thickness Refractive Index SE: Film thickness Refractive Index Surface roughness Uniformity Birefringence Crystallinity Anisotropy |
Film thickness Step height Roughness Waviness 2D stress Surface curvature
|
In addition to thickness it provide information about: Roughness, density and thickness of each individual sublayer, interdiffusion between sublayers |
* FR-pOrtable without the stage