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Comparison of Technologies

Parameter
FR-tools
Ellipsometry
Stylus Profilometer
X-ray reflectivity (XRR)
Minimum thickness
1nm
<1nm
20nm
<1nm
Maximum thickness
500um
10um
Few mm
200-300 nm (depending on the contrast)
RI measurement
Yes
Yes
No
No
Thickness Mapping
Yes
Yes
No
Time consuming
Step Profiling
No
No
Yes
No
Capability for Process Monitoring
High
Moderate
N/A
N/A
Probe goes over the sample
Yes
No
No
No
Overall Measurement Speed
High
Moderate
Slow
Very Slow
Data Acquisition Rate
10msec per measurement
>2sec-fast mode,
>10 sec. – Standard mode
5-30sec per
measurement
Average: 30 min per measurement-
Portability
Yes
No
No
No
Easy of Use
Yes
Moderate
Yes
No
Destructive
No
No
Yes
No
Special Training
No
Yes
No
Yes
Moving Parts
No
Yes
Yes
Yes
Repeatability/Stability
0.1nm
0.1nm
0.4nm
Yes
Thermal Measurements
Yes
Yes
No
Ν/Α
Sample Preparation
No
No
Yes
No
Multiple Layers Measurement
Yes
Yes
No
Yes
Customization
Yes
No
No
Yes
Reflectance, Transmittance,
Absorbance, Specular/Diffuse
Reflectance, Haze, Color measurements
Yes
Yes (under certain conditions)
No
No
Dimensions
Handheld/Table-top
Small (>300mm W x 110mm
D x 40mm H)*
Table-top
Medium (500 mm W x 300
mm D x 300 mm H)
Table-top Medium (450 mm W x
550 mm D x 350 mm H)
Large (1400mm W x 850mm D x 1800 H)
Weight
0.65Kg
>17 kg
>30 kg
>350Kg
Price of Replacement parts
Low
High
High
Extremely High
Price (Basic system)
Low (<$10K)
High(>$30K)
High(>$30K)
Very High
Particular Characteristics
Film thickness
Refractive Index
Surface roughness Uniformity
SWE: Film thickness
Refractive Index SE:
Film thickness
Refractive Index Surface
roughness Uniformity
Birefringence Crystallinity Anisotropy Uniformity
Film thickness Step height
Roughness Waviness 2D stress Surface curvature
In addition to thickness
it provide information about:
Roughness, density and thickness
of each individual sublayer, interdiffusion between sublayers