Comparison of Technologies

Parameter	FR-tools	Ellipsometry	Stylus Profilometer	X-ray reflectivity (XRR)
Minimum thickness	1nm	<1nm	20nm	<1nm
Maximum thickness	500um	10um	Few mm	200-300 nm (depending on the contrast)
RI measurement	Yes	Yes	No	No
Thickness Mapping	Yes	Yes	No	Time consuming
Step Profiling	No	No	Yes	No
Capability for Process Monitoring	High	Moderate	N/A	N/A
Probe goes over the sample	Yes	No	No	No
Overall Measurement Speed	High	Moderate	Slow	Very Slow
Data Acquisition Rate	10msec per measurement	>2sec-fast mode, >10 sec. – Standard mode	5-30sec per measurement	Average: 30 min per measurement-
Portability	Yes	No	No	No
Easy of Use	Yes	Moderate	Yes	No
Destructive	No	No	Yes	No
Special Training	No	Yes	No	Yes
Moving Parts	No	Yes	Yes	Yes
Repeatability/Stability	0.1nm	0.1nm	0.4nm	Yes
Thermal Measurements	Yes	Yes	No	Ν/Α
Sample Preparation	No	No	Yes	No
Multiple Layers Measurement	Yes	Yes	No	Yes
Customization	Yes	No	No	Yes
Reflectance, Transmittance, Absorbance, Specular/Diffuse Reflectance, Haze, Color measurements	Yes	Yes (under certain conditions)	No	No
Dimensions	Handheld/Table-top Small (>300mm W x 110mm D x 40mm H)*	Table-top Medium (500 mm W x 300 mm D x 300 mm H)	Table-top Medium (450 mm W x 550 mm D x 350 mm H)	Large (1400mm W x 850mm D x 1800 H)
Weight	0.65Kg	>17 kg	>30 kg	>350Kg
Price of Replacement parts	Low	High	High	Extremely High
Price (Basic system)	Low (<$10K)	High(>$30K)	High(>$30K)	Very High
Particular Characteristics	Film thickness Refractive Index Surface roughness Uniformity	SWE: Film thickness Refractive Index SE: Film thickness Refractive Index Surface roughness Uniformity Birefringence Crystallinity Anisotropy Uniformity	Film thickness Step height Roughness Waviness 2D stress Surface curvature	In addition to thickness it provide information about: Roughness, density and thickness of each individual sublayer, interdiffusion between sublayers