Comparison of Technologies
Parameter | FR-tools | Ellipsometry | Stylus Profilometer | X-ray reflectivity (XRR) |
---|---|---|---|---|
Minimum thickness
| 1nm | <1nm | 20nm | <1nm
|
Maximum thickness | 500um | 10um | Few mm | 200-300 nm (depending on the contrast) |
RI measurement | Yes | Yes | No | No |
Thickness Mapping
| Yes | Yes | No | Time consuming |
Step Profiling
| No | No | Yes | No |
Capability for Process Monitoring
| High | Moderate | N/A | N/A |
Probe goes over the sample
| Yes | No | No | No |
Overall Measurement Speed
| High | Moderate | Slow | Very Slow |
Data Acquisition Rate
| 10msec per measurement | >2sec-fast mode, >10 sec. – Standard mode | 5-30sec per measurement | Average: 30 min per measurement-
|
Portability
| Yes | No | No | No |
Easy of Use
| Yes | Moderate
| Yes | No |
Destructive
| No | No | Yes | No |
Special Training
| No | Yes | No | Yes |
Moving Parts
| No | Yes | Yes | Yes |
Repeatability/Stability
| 0.1nm | 0.1nm | 0.4nm | Yes |
Thermal Measurements
| Yes
| Yes
| No
| Ν/Α
|
Sample Preparation
| No | No | Yes | No |
Multiple Layers Measurement
| Yes | Yes | No | Yes |
Customization
| Yes | No | No | Yes |
Reflectance, Transmittance, Absorbance, Specular/Diffuse Reflectance, Haze, Color measurements | Yes | Yes (under certain conditions) | No | No |
Dimensions
| Handheld/Table-top
Small (>300mm W x 110mm D x 40mm H)* | Table-top
Medium (500 mm W x 300 mm D x 300 mm H) | Table-top
Medium (450 mm W x 550 mm D x 350 mm H) | Large (1400mm W x 850mm D x 1800 H) |
Weight
| 0.65Kg | >17 kg | >30 kg | >350Kg |
Price of Replacement parts
| Low
| High | High | Extremely High |
Price (Basic system)
| Low (<$10K) | High(>$30K) | High(>$30K) | Very High |
Particular Characteristics
| Film thickness
Refractive Index Surface roughness Uniformity | SWE:
Film thickness
Refractive Index SE: Film thickness Refractive Index Surface roughness Uniformity Birefringence Crystallinity Anisotropy Uniformity | Film thickness
Step height
Roughness Waviness 2D stress Surface curvature | In addition to thickness it provide information about: Roughness, density and thickness of each individual sublayer, interdiffusion between sublayers |