FR-Scanner is a compact bench-top tool suitable for the automatic characterization through reflectance measurements of films and coatings on large substrates. FR-Scanner is the ideal tool for the fast and accurate mapping of films in terms of thickness, refractive index, uniformity, color etc. Wafers of any diameter/shape can be accommodated on the vacuum chuck.
Typical scanning of an 8” Si wafer at 625 points take less than 60 sec. The optical head follows a unique design and accommodate the spectrometer, a hybrid light source and all other optical parts. In this design there are not any bending or moving fibers and therefore excellent performance in terms of accuracy, reproducibility and long term stability is guaranteed. Furthermore the special design of the light source offer extreme long life, 10000h.

Thanks to its robust & unique optical and mechanical design, FR-Scanner scan the samples under test in very high speed by rotating the stage and by moving linearly the optical head on top (polar scanning). This way accurate reflectance data with high repeatability are recorded in a very short time making FR-Scanner the ideal tool for the at-line and on-line characterization of wafers or other substrates at processing facilities. Furthermore Cartesian scanning models can be combined with transmittance kit and support both reflectance & transmittance measurements. In transmittance mode film thickness and refractive index measurements are also supported (e.g. for quartz or transparent wafers).

Software

FR-Monitor software, control the FR-Scanner, and performs data acquisition, and film thickness-optical constants calculations. A database with >350 widely used materials is included and can easily be expanded by the user. The system is shipped ready for measurements and it can be easily used by anyone with basic computer skills without deep knowledge of optics. The only additional part needed is a PC running Windows .The software is loaded with numerous scanning profiles for any wafer size, while the user can load its own profile either in polar or Cartesian coordinates