Introduction

FR-Mapper module is an upgrade of FR-Basic tool that allows for automatic characterization of single films or stack of films over large areas or preselected positions through scanning. In particular FR-Mapper allows for automatic, at high resolution XY mapping of:

  • Film thickness
  • Optical properties (n & k)
  • Reflectance
  • Non-uniformity
  • Roughness
FR-Mapper

In this configuration, the reflection probe of the FR-Basic is mounted on the holder on the FR-Mapper module that has been designed in such a way to keep the optical probe at a fixed point while the sample is moving. This configuration provides the optimum results in terms of repeatability and precision. However, if smaller footprints are needed, other configurations are possible, upon customer request.  The entire system (hardware – software) is shipped ready for measurements (turn-key solution). It and can be easily used by anyone with basic computer skills without any deep knowledge of optics. The only additional part needed is a computer with two free USB ports running Windows XP/Vista/7.

Software

The FR-Mapper unit is fully controlled by FR-Monitor software (one software for all modules). FR-Monitor® is used for the core-unit (FR-Basic) control and for the control of all additional modules (e.g. FR-Mapper). FR-Monitor allows for the processing of the spectral measurements and offers unique capabilities for a wide range of applications and versatility. In the particular case of FR-Mapper, the FR-Monitor provides full control of the unit and the user can define the area to be scanned, the step, or the list of certain points to be measured etc.

The scanned area could be rectangular, linear, polar or an array of preselected points.
FR-Mapper

 

FR-Mapper

Thanks to the fast and accurate X-Y stage that is integrated in FR-Mapper, detailed mapping of thickness and optical properties on large Si wafers is performed. In addition graphical representation of results in provided along with standard txt format.


Specifications**

Applications

Thickness
5nm - 150μm*
Film Characterization
Wavelength range
200-1100nm*
Non-Uniformity
Precision
0.2nm
Processing quality evaluation
Accuracy
better than 0.5 %
Optical disk industry
Spot size
0.5mm
Semiconductor
Light Source
Scanned Area 10cm X 10cm (max.)
Optical coating
Sample size
Any size <6inch diameter**
Hard-coats
Computer requirements
PC with Windows XP/Vista/7 32/64bit and a USB port available
 
Power requirements
110V/230V AC
Dimensions (WxLxH)
36cm x 40cm x 18cm*
Weight
27Kg
* Specifications are subject to change without any notice
** Other dimensions are available upon request

 

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